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Fundamentals of microfabrication and nanotechnology; vol.3 from MEMS to Bio- MEMS and Bio- NEMS : manufacturing techniques and applications

Madou, Marc J.

Fundamentals of microfabrication and nanotechnology; vol.3 from MEMS to Bio- MEMS and Bio- NEMS : manufacturing techniques and applications - 3rd ed. - Boca Raton CRC Press 2012 - xiii, 636p.

ISBN: 9781420055160

Subjects--Topical Terms:
Nanotechnology

Dewey Class. No.: 620.5 M266f3

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Fundamentals of microfabrication and nanotechnology; vol.3 from MEMS to Bio- MEMS and Bio- NEMS : manufacturing techniques and applications

Welcome to LNMIIT Central Library
Online Public Access Catalogue