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MEMS and Microsystems design, manufacturing, and nanoscale engineering

Hsu, Tai-Ran

MEMS and Microsystems design, manufacturing, and nanoscale engineering - 2nd ed. - Hoboken Wiley 2008 - xxv, 550p.

ISBN: 9780470083017

Subjects--Topical Terms:
Microelectronics
Microelectromechanical systems

Dewey Class. No.: 621 H85972m2

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MEMS and Microsystems design, manufacturing, and nanoscale engineering

Welcome to LNMIIT Central Library
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