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Micromachines as tools for nanotechnology

Fujita, H.

Micromachines as tools for nanotechnology H. Fujita - New Delhi Springer (India) 2003 - xii, 211p.

ISBN: 9798181282025

Subjects--Topical Terms:
Nanotechnology
Microelectromechanical systems
Structural control (Engineering)
Electronics
Engineering

Dewey Class. No.: 620.5 M583m

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Micromachines as tools for nanotechnology

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