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Foundations of MEMS

Liu, Chang

Foundations of MEMS Chang Liu - 2nd ed. - Noida Pearson 2011 - 576p.

International ed. contributed by
Vaishali B. Mungurwadi
Anil V. Nandi

ISBN: 9788131764756

Subjects--Topical Terms:
Microelectromechanical systems

Dewey Class. No.: 621.3 L7401f2

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Foundations of MEMS

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