Foundations of MEMS
Liu, Chang
Foundations of MEMS Chang Liu - 2nd ed. - Boston Pearson Education Limited 2012 - 567p.
9780273752240
Microelectromechanical systems
621.3 L7401f2
Foundations of MEMS Chang Liu - 2nd ed. - Boston Pearson Education Limited 2012 - 567p.
9780273752240
Microelectromechanical systems
621.3 L7401f2