Madou, Marc J. <br/><br/>
Fundamentals of microfabrication and nanotechnology; vol.3  from MEMS to Bio- MEMS and Bio- NEMS : manufacturing techniques and applications 

 - 3rd ed. 
 - Boca Raton  CRC Press  2012 
 - xiii, 636p. 
<br/><br/><label>ISBN: </label>9781420055160 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanotechnology
<br/><br/><label>Dewey Class. No.: </label>620.5 M266f3