TY  - BOOK
AU  - Madou, Marc J.
TI  - Fundamentals of microfabrication and nanotechnology; vol.3: from MEMS to Bio- MEMS and Bio- NEMS : manufacturing techniques and applications
SN  - 9781420055160
U1  - 620.5 M266f3 
PY  - 2012///
CY  - Boca Raton
PB  - CRC Press
KW  - Nanotechnology
ER  -