Madou, Marc J.  <br/><br/>
Fundamentals of microfabrication and nanotechnology; vol. 1  solid-state physics, fluidics, and analytical techniques in micro-and nanotechnology 

 - 3rd ed. 
 - Boca Raton  CRC Press  2012 
 - xiii, 641p. 
<br/><br/><label>ISBN: </label>9781420055115 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanotechnology
<br/><br/><label>Dewey Class. No.: </label>620.5 M266f3