TY  - BOOK
AU  - Madou, Marc J. 
TI  - Fundamentals of microfabrication and nanotechnology; vol. 1: solid-state physics, fluidics, and analytical techniques in micro-and nanotechnology
SN  - 9781420055115
U1  - 620.5 M266f3 
PY  - 2012///
CY  - Boca Raton
PB  - CRC Press
KW  - Nanotechnology
ER  -