Nitaigour Premchand Mahalik <br/><br/>
MEMS 

 - New Delhi  Mcgraw Hill Education  2007 
 - 500 p. 
<br/><br/><label>ISBN: </label>9780070634459 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MicroelectronicsMicroelectromechanical systems
<br/><br/><label>Dewey Class. No.: </label>621.381  / M2774m