TY  - BOOK
AU  - Nitaigour Premchand Mahalik
TI  - MEMS
SN  - 9780070634459
U1  - 621.381 
PY  - 2007///
CY  - New Delhi
PB  - Mcgraw Hill Education
KW  - MicroelectronicsMicroelectromechanical systems
ER  -