Hsu, Tai-Ran  <br/><br/>
MEMS and Microsystems  design, manufacturing, and nanoscale engineering 

 - 2nd ed. 
 - Hoboken  Wiley  2008 
 - xxv, 550p. 
<br/><br/><label>ISBN: </label>9780470083017 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics<br/>Microelectromechanical systems
<br/><br/><label>Dewey Class. No.: </label>621 H85972m2