Lobontiu, Nicolae <br/><br/>
Mechanics of microelectromechanical systems 
Nicolae Lobontiu 
 - New Delhi  Kluwer academic Publishers  2005 
 - xi, 405p. 
<br/><br/><label>ISBN: </label>9788181288493 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems<br/>Mechanical engineering
<br/><br/><label>Dewey Class. No.: </label>621.381 L7861m