TY  - BOOK
AU  - Lobontiu, Nicolae
AU  - Garcia, Ephrahim
TI  - Mechanics of microelectromechanical systems
SN  - 9788181288493
U1  - 621.381 L7861m 
PY  - 2005///
CY  - New Delhi
PB  - Kluwer academic Publishers
KW  - Microelectromechanical systems
KW  - Mechanical engineering
ER  -