TY  - BOOK
AU  - Rebeiz, Gabriel M. 
TI  - RF MEMS: theory, design, and technology
SN  - 9788126525805
U1  - 621.381 R241r 
PY  - 2003///
CY  - New Delhi
PB  - Wiley India Pvt. Ltd.
KW  - Microelectromechanical systems
KW  - Very high speed integrated circuits
ER  -