Hsu, Tai-Ran  <br/><br/>
MEMS & microsystems  design and manufacture 
Tai-Ran Hsu 
 - New Delhi  Mcgraw Hill Education (India) Private Limited  2002 
 - xii, 436p. 
<br/><br/><label>ISBN: </label>9780070487093 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems
<br/><br/><label>Dewey Class. No.: </label>621.381 H85972m