TY  - BOOK
AU  - Hsu, Tai-Ran 
TI  - MEMS & microsystems: design and manufacture
SN  - 9780070487093
U1  - 621.381 H85972m 
PY  - 2002///
CY  - New Delhi
PB  - Mcgraw Hill Education (India) Private Limited
KW  - Microelectromechanical systems
ER  -