Taniguchi, Norio <br/><br/>
Nanotechnology  integrated processing systems for ultra-precision and ultra-fine products 
Norio Taniguchi 
 - New Delhi  Oxford University Press  1996 
 - xiv, 406p. 
<br/><br/><label>ISBN: </label>9780195693270 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanotechnology
<br/><br/><label>Dewey Class. No.: </label>620.5 T1568n