TY  - BOOK
AU  - Plummer, James D
TI  - Silicon VLSI technology: : fundamentals, practice, and modeling
SN  - 9788131726044
U1  - 621.395 P736S 
PY  - 2001///
CY  - New Delhi
PB  - Pearson Education
KW  - Silicon oxide films
KW  - Metal oxide semiconductors
ER  -