TY  - BOOK
AU  - Fujita, H.
TI  - Micromachines as tools for nanotechnology
SN  - 9798181282025
U1  - 620.5 M583m 
PY  - 2003///
CY  - New Delhi 
PB  - Springer (India) 
KW  - Nanotechnology
KW  - Microelectromechanical systems
KW  - Structural control (Engineering)
KW  - Electronics
KW  - Engineering
ER  -