Liu, Chang  <br/><br/>
Foundations of MEMS  
Chang Liu 
 - 2nd ed.  
 - Noida   Pearson   2011 
 - 576p. 
<br/><br/> International ed. contributed by <br/>Vaishali B. Mungurwadi<br/>Anil V. Nandi  
<br/><br/><label>ISBN: </label>9788131764756 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems
<br/><br/><label>Dewey Class. No.: </label>621.3 L7401f2