TY  - BOOK
AU  - Liu, Chang 
TI  - Foundations of MEMS 
SN  - 9788131764756
U1  - 621.3 L7401f2 
PY  - 2011///
CY  - Noida 
PB  - Pearson 
KW  - Microelectromechanical systems
N1  - International ed. contributed by 
Vaishali B. Mungurwadi
Anil V. Nandi
ER  -