May, Gary S. <br/><br/>
Fundamentals of semiconductor fabrication 
Gary S. May 
 - India  John Wiley & Sons, Inc.  2004 
 - xiii, 305p. 
<br/><br/><label>ISBN: </label>981253072x 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction<br/>Integrated circuits--Design and construction
<br/><br/><label>Dewey Class. No.: </label>621.38152 M451f