TY  - BOOK
AU  - May, Gary S.
AU  - Sze, Simon M.
TI  - Fundamentals of semiconductor fabrication
SN  - 981253072x
U1  - 621.38152 M451f 
PY  - 2004///
CY  - India
PB  - John Wiley & Sons, Inc.
KW  - Semiconductors
KW  - Design and construction
KW  - Integrated circuits
ER  -