TY  - BOOK
AU  - Jones, Thomas B.
AU  - Nenadic, Nenad G.
TI  - Electromechanics and MEMS
SN  - 9781316609040
U1  - 621.381 J7101e 
PY  - 2013///
CY  - Delhi
PB  - Cambridge University Press
KW  - Microelectromechanical systems
ER  -