TY  - BOOK
AU  - Varadan, Vijay K.
AU  - Vinoy, K. J. 
AU  - Gopalakrishnan, S.
TI  - Smart material systems and MEMS: design and development methodologies
SN  - 9788126531707
U1  - 621.381 V42s 
PY  - 2006///
CY  - New Delhi
PB  - Wiley India Pvt. Ltd.
KW  - Microelectromechanical systems
KW  - Smart materials
ER  -