TY  - BOOK
AU  - Qin, Yi 
TI  - Micro-Manufacturing Engineering and Technology
SN  - 9780815515456
U1  - 670 Q15m 
PY  - 2010///
CY  - New York
PB  - William Andrew Publishing
KW  - Manufactures Microtechnology Manufacturing processes
N1  - Full text
UR  - https://www.sciencedirect.com/science/book/9780815515456
ER  -