Liu, Chang   <br/><br/>
Foundations of MEMS 
Chang Liu 
 - 2nd ed. 
 - Boston  Pearson Education Limited    2012 
 - 567p. 
<br/><br/><label>ISBN: </label>9780273752240 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems
<br/><br/><label>Dewey Class. No.: </label>621.3 L7401f2