TY  - BOOK
AU  - Liu, Chang  
TI  - Foundations of MEMS
SN  - 9780273752240
U1  - 621.3 L7401f2 
PY  - 2012///
CY  - Boston
PB  - Pearson Education Limited  
KW  - Microelectromechanical systems
UR  - https://ebookcentral.proquest.com/lib/lnmiit/reader.action?docID=5173704
ER  -