Campbell, Stephen A. <br/><br/>
Science and engineering of microelectronic fabrication 
Stephen A. Campbell 
 - 2nd ed. 
 - India  Oxford University Press  2001 
 - xiv, 603p. 
 - Oxford Series in Electrical and Computer Engineering .
 - Sedra, Adel S. .
<br/><br/><label>ISBN: </label>9780195136050 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics<br/>Semiconductors--Design and construction<br/>Computer engineering
<br/><br/><label>Dewey Class. No.: </label>621.38152 C152s2