TY  - BOOK
AU  - Campbell, Stephen A.
TI  - Science and engineering of microelectronic fabrication
T2  - Sedra, Adel S
SN  - 9780195136050
U1  - 621.38152 C152s2 
PY  - 2001///
CY  - India
PB  - Oxford University Press
KW  - Microelectronics
KW  - Semiconductors
KW  - Design and construction
KW  - Computer engineering
ER  -