Fujita, H. <br/><br/>
Micromachines as tools for nanotechnology 
H. Fujita 
 - New Delhi  Springer (India)  2003 
 - xii, 211p. 
 - Microtechnology and MEMS .
 - Baltes, H.  .
<br/><br/><label>ISBN: </label>9798181282025 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanotechnology<br/>Microelectromechanical systems<br/>Structural control (Engineering)<br/>Electronics<br/>Engineering
<br/><br/><label>Dewey Class. No.: </label>620.5 M583m