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1.
MEMS and Microsystems design, manufacturing, and nanoscale engineering by
Edition: 2nd ed.
Material type: Text Text
Publication details: Hoboken Wiley 2008
Availability: Items available for loan: Central Library (1)Call number: 621 H85972m2.

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2.
MEMS & microsystems design and manufacture Tai-Ran Hsu by
Material type: Text Text
Language: English
Publication details: New Delhi Mcgraw Hill Education (India) Private Limited 2002
Availability: Items available for loan: Central Library (2)Call number: 621.381 H85972m, ...

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