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1.
Fundamentals of microfabrication and nanotechnology; vol.3 from MEMS to Bio- MEMS and Bio- NEMS : manufacturing techniques and applications by
Edition: 3rd ed.
Material type: Text Text
Publication details: Boca Raton CRC Press 2012
Availability: Items available for loan: Central Library (1)Call number: 620.5 M266f3 .

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2.
Fundamentals of microfabrication and nanotechnology; vol. 1 solid-state physics, fluidics, and analytical techniques in micro-and nanotechnology by
Edition: 3rd ed.
Material type: Text Text
Publication details: Boca Raton CRC Press 2012
Availability: Items available for loan: Central Library (1)Call number: 620.5 M266f3.

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3.
Fundamentals of microfabrication and nanotechnology; vol. 2 manufacturing techniques for microfabrication and nanotechnology by
Edition: 3rd ed.
Material type: Text Text
Publication details: Boca Raton CRC Press 2012
Availability: Items available for loan: Central Library (1)Call number: 620.5M266f3(vol.2) .

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