000			00537nam a2200169Ia 4500
005			20220510164211.0
008			170527s2016||||xx |||||||||||||| ||und||
020			_a9781420055115
082			_a620.5 M266f3
100			_aMadou, Marc J.
245		0	_aFundamentals of microfabrication and nanotechnology; vol. 1 _bsolid-state physics, fluidics, and analytical techniques in micro-and nanotechnology
250			_a3rd ed.
260			_bCRC Press _c2012 _aBoca Raton
300			_axiii, 641p.
650			_aNanotechnology
942			_cREF
999			_c12440 _d12440