| 000 | 00517nam a2200169Ia 4500 | ||
|---|---|---|---|
| 005 | 20220510164803.0 | ||
| 008 | 170527s2016||||xx |||||||||||||| ||und|| | ||
| 020 | _a9781420055191 | ||
| 082 | _a620.5 M266f3 | ||
| 100 | _aMadou, Marc J. | ||
| 245 | 0 |
_aFundamentals of microfabrication and nanotechnology; vol. 2 _bmanufacturing techniques for microfabrication and nanotechnology |
|
| 250 | _a3rd ed. | ||
| 260 |
_bCRC Press _c2012 _aBoca Raton |
||
| 300 | _axiii, 656p. | ||
| 650 | _aNanotechnology | ||
| 942 | _cREF | ||
| 999 |
_c12441 _d12441 |
||