| 000 | 00502nam a2200181Ia 4500 | ||
|---|---|---|---|
| 005 | 20220511210238.0 | ||
| 008 | 170527s2016||||xx |||||||||||||| ||und|| | ||
| 020 | _a9780470083017 | ||
| 082 | _a621 H85972m2 | ||
| 100 | _aHsu, Tai-Ran | ||
| 245 | 0 |
_aMEMS and Microsystems _bdesign, manufacturing, and nanoscale engineering |
|
| 250 | _a2nd ed. | ||
| 260 |
_bWiley _c2008 _aHoboken |
||
| 300 | _axxv, 550p. | ||
| 650 | _aMicroelectronics | ||
| 650 | _aMicroelectromechanical systems | ||
| 942 | _cREF | ||
| 999 |
_c13111 _d13111 |
||