| 000 | 00554nam a2200193Ia 4500 | ||
|---|---|---|---|
| 999 |
_c13123 _d13123 |
||
| 005 | 20210412171231.0 | ||
| 008 | 170527s2016||||xx |||||||||||||| ||und|| | ||
| 020 | _a9788181288493 | ||
| 041 | _aeng | ||
| 082 | _a621.381 L7861m | ||
| 100 | _aLobontiu, Nicolae | ||
| 245 | 0 |
_aMechanics of microelectromechanical systems _cNicolae Lobontiu |
|
| 260 |
_aNew Delhi _bKluwer academic Publishers _c2005 |
||
| 300 | _axi, 405p. | ||
| 650 | _aMicroelectromechanical systems | ||
| 650 | _aMechanical engineering | ||
| 700 | _aGarcia, Ephrahim | ||
| 942 | _cBK | ||