| 000 | 00494nam a2200169Ia 4500 | ||
|---|---|---|---|
| 999 |
_c13200 _d13200 |
||
| 005 | 20210412164508.0 | ||
| 008 | 170527s2016||||xx |||||||||||||| ||und|| | ||
| 020 | _a9780070487093 | ||
| 041 | _aeng | ||
| 082 | _a621.381 H85972m | ||
| 100 | _aHsu, Tai-Ran | ||
| 245 | 0 |
_aMEMS & microsystems _bdesign and manufacture _cTai-Ran Hsu |
|
| 260 |
_aNew Delhi _bMcgraw Hill Education (India) Private Limited _c2002 |
||
| 300 | _axii, 436p. | ||
| 650 | _aMicroelectromechanical systems | ||
| 942 | _cBK | ||