| 000 | 00506nam a2200169Ia 4500 | ||
|---|---|---|---|
| 999 |
_c13842 _d13842 |
||
| 005 | 20210301101731.0 | ||
| 008 | 170527s2016||||xx |||||||||||||| ||und|| | ||
| 020 | _a9780195693270 | ||
| 041 | _aeng | ||
| 082 | _a620.5 T1568n | ||
| 100 | _aTaniguchi, Norio | ||
| 245 | 0 |
_aNanotechnology _bintegrated processing systems for ultra-precision and ultra-fine products _cNorio Taniguchi |
|
| 260 |
_aNew Delhi _bOxford University Press _c1996 |
||
| 300 | _axiv, 406p. | ||
| 650 | _aNanotechnology | ||
| 942 | _cBK | ||