| 000 | 00591nam a2200217Ia 4500 | ||
|---|---|---|---|
| 999 |
_c1708 _d1708 |
||
| 005 | 20210226163612.0 | ||
| 008 | 170527s2016||||xx |||||||||||||| ||und|| | ||
| 020 | _a9798181282025 | ||
| 041 | _aeng | ||
| 082 | _a620.5 M583m | ||
| 100 | _aFujita, H. | ||
| 245 | 0 |
_aMicromachines as tools for nanotechnology _cH. Fujita |
|
| 260 |
_aNew Delhi _bSpringer (India) _c2003 |
||
| 300 | _axii, 211p. | ||
| 650 | _aNanotechnology | ||
| 650 | _aMicroelectromechanical systems | ||
| 650 | _aStructural control (Engineering) | ||
| 650 | _aElectronics | ||
| 650 | _aEngineering | ||
| 942 | _cBK | ||