000 00626nam a22002177a 4500
005 20220511164300.0
008 181203b ||||| |||| 00| 0 eng d
020 _a9781580538183
041 _aeng
082 _a620.5 N112o
100 _aNabok, Alexei
245 _aOrganic and inorganic nanostructures
_cAlexei Nabok
260 _aBoston
_bArtech House
_c2005
300 _axi, 268p.
440 _aRecent Titles in the Artech House Microelectromechanical Systems (Mems) Series
650 _aNanostructured materials
650 _aNanotechnology
650 _aThin films
650 _aMicrostructure
942 _cREF
999 _c20892
_d20892