| 000 | 00491nam a22001817a 4500 | ||
|---|---|---|---|
| 999 |
_c20930 _d20930 |
||
| 005 | 20190102170942.0 | ||
| 008 | 190102b ||||| |||| 00| 0 eng d | ||
| 020 | _a9781316609040 | ||
| 041 | _aeng | ||
| 082 | _a621.381 J7101e | ||
| 100 | _aJones, Thomas B. | ||
| 245 |
_aElectromechanics and MEMS _cThomas B. Jones |
||
| 260 |
_aDelhi _bCambridge University Press _c2013 |
||
| 300 | _axx, 559p | ||
| 650 | _aMicroelectromechanical systems | ||
| 700 | _aNenadic, Nenad G. | ||
| 942 | _cBK | ||