000 00598nam a22002057a 4500
999 _c21347
_d21347
005 20190427114257.0
008 190427b ||||| |||| 00| 0 eng d
020 _a9788126531707
041 _aeng
082 _a621.381 V42s
100 _aVaradan, Vijay K.
245 _aSmart material systems and MEMS
_bdesign and development methodologies
_cVijay K.Varadan
260 _aNew Delhi
_bWiley India Pvt. Ltd.
_c2006
300 _axii, 404p.
650 _aMicroelectromechanical systems
650 _aSmart materials
700 _aVinoy, K. J.
700 _aGopalakrishnan, S.
942 _cBK