| 000 | 00552nam a22001937a 4500 | ||
|---|---|---|---|
| 005 | 20220415152613.0 | ||
| 008 | 210426b ||||| |||| 00| 0 eng d | ||
| 020 | _a9780273752240 | ||
| 041 | _aeng | ||
| 082 | _a621.3 L7401f2 | ||
| 100 | _aLiu, Chang | ||
| 245 |
_aFoundations of MEMS _cChang Liu |
||
| 250 | _a2nd ed. | ||
| 260 |
_aBoston _bPearson Education Limited _c2012 |
||
| 300 | _a567p. | ||
| 650 | _aMicroelectromechanical systems | ||
| 856 | _uhttps://ebookcentral.proquest.com/lib/lnmiit/reader.action?docID=5173704 | ||
| 942 | _cEB | ||
| 999 |
_c22887 _d22887 |
||