000			00696nam a2200229Ia 4500
999			_c2650 _d2650
005			20210505122137.0
008			170527s2016||||xx |||||||||||||| ||und||
020			_a9780195136050
041			_aeng
082			_a621.38152 C152s2
100			_aCampbell, Stephen A.
245		4	_aScience and engineering of microelectronic fabrication _cStephen A. Campbell
250			_a2nd ed.
260			_aIndia _bOxford University Press _c2001
300			_axiv, 603p.
440			_aOxford Series in Electrical and Computer Engineering
490			_aSedra, Adel S.
650			_aMicroelectronics
650			_aSemiconductors _xDesign and construction
650			_aComputer engineering
942			_cBK