000 00477nam a2200181Ia 4500
999 _c4608
_d4608
005 20210510103744.0
008 170527s2016||||xx |||||||||||||| ||und||
020 _a9788131202791
041 _aeng
082 _a621.38152 Oh6m2
100 _aOhring, Milton
245 0 _aMaterials science of thin films
_bdeposition and structure
_cMilton Ohring
250 _a2nd ed.
260 _aNew Delhi
_bElsevier
_c2002
300 _axxi, 794p.
650 _aMaterials
942 _cBK