| 000 | 00466nam a2200157Ia 4500 | ||
|---|---|---|---|
| 005 | 20220507155828.0 | ||
| 008 | 170527s2016||||xx |||||||||||||| ||und|| | ||
| 020 | _a9780195693270 | ||
| 082 | _a620 T1568n | ||
| 100 | _aTaniguchi, Norio | ||
| 245 | 0 |
_aNanotechnology _bintegrated processing systems for ultra-precision and ultra-fine products |
|
| 260 |
_bOxford University Press _c1996 _aNew Delhi |
||
| 300 | _axiv, 406p. | ||
| 650 | _aNanotechnology | ||
| 942 | _cRT | ||
| 999 |
_c9551 _d9551 |
||